REACTIVE ATOM SURFACE SCATTERING - THE ADSORPTION AND REACTION OF ATOMIC OXYGEN ON THE SI(100) SURFACE

被引：35
|
作者：
ENGSTROM, JR
NELSON, MM
ENGEL, T
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期
关键词：
D O I：
10.1116/1.576011
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
下载
收藏
页码：1837 / 1840
页数：4
相关论文
共 50 条
  • [21] DIMERIZATION AND ADSORPTION OF SI ON THE SI(100) SURFACE
    GRYKO, J
    ALLEN, RE
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03): : 656 - 658
  • [22] STUDY BY THERMAL-ENERGY ATOM SCATTERING OF THE RECONSTRUCTIONS OF THE SI(100) SURFACE
    BARBIER, L
    LAPUJOULADE, J
    VACUUM, 1990, 41 (1-3) : 615 - 617
  • [23] Adsorption of trisilylamine on the Si(100) surface
    Bush, B. W.
    Marquis, A. H.
    Egwu, O.
    Craig, J. H., Jr.
    SURFACE AND INTERFACE ANALYSIS, 2008, 40 (10) : 1402 - 1405
  • [24] Adsorption of Ni on Si(100) surface
    Ma, L
    Wang, JG
    Wei, SY
    Wang, GH
    VACUUM, 2005, 77 (03) : 337 - 341
  • [25] Adsorption of Ag on Si(100) surface
    Wei, Shu-yi
    Li, Wei
    Zhang, Fang
    Zhao, Xu
    PHYSICA B-CONDENSED MATTER, 2007, 390 (1-2) : 191 - 195
  • [26] Adsorption of Co on Si(100) surface
    Wei, SY
    Yang, ZX
    Dai, XQ
    Zhang, KM
    SURFACE SCIENCE, 2002, 504 (1-3) : 37 - 41
  • [27] AN ATOM SCATTERING STUDY OF THE KINETICS OF OXYGEN-ADSORPTION ON A NICKEL (001) SURFACE
    IBANEZ, J
    ROJO, JM
    SOLID STATE COMMUNICATIONS, 1982, 44 (08) : 1133 - 1135
  • [28] Iodine Adsorption on Arrays, Clusters, and Pairs of Reactive Sites on the Si(100) Surface
    Ferng, Shyh-Shin
    Lin, Deng-Sung
    JOURNAL OF PHYSICAL CHEMISTRY C, 2012, 116 (04): : 3091 - 3096
  • [29] THE ADSORPTION OF OXYGEN ON THE FE(100) SURFACE
    LU, JP
    ALBERT, MR
    BERNASEK, SL
    DWYER, DJ
    SURFACE SCIENCE, 1989, 215 (03) : 348 - 362
  • [30] Adsorption of the Au atom on Si(001) surface
    Ju, Weiwei
    Li, Tongwei
    HIGH-PERFORMANCE CERAMICS IV, PTS 1-3, 2007, 336-338 : 2521 - +
12345