THIN-FILM APPLICATIONS IN HIGH-FREQUENCY DEVICES

被引：0
|
作者：
BECHTEL, NG [1 ]
机构：
[1] FAIRCHILD MICROWAVE & OPTOELECTR,PALO ALTO,CA 94304
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 01期
关键词：
D O I：
10.1116/1.1318006
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：287 / &
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