THIN-FILM APPLICATIONS IN HIGH-FREQUENCY DEVICES

被引：0

作者：

BECHTEL, NG ^{[1
]}

机构：

[1] FAIRCHILD MICROWAVE & OPTOELECTR,PALO ALTO,CA 94304

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 01期

关键词：

D O I：

10.1116/1.1318006

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：287 / &

共 50 条

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