BISTABLE FLUIDIC ELEMENTS IN LIGA TECHNIQUE FOR FLOW-CONTROL IN FLUIDIC MICROACTUATORS

被引：11
|
作者：
VOLLMER, J
HEIN, H
MENZ, W
WALTER, F
机构：
[1] Karlsruhe Nuclear Research Centre, Institute for Microstructure Technology, D-76021 Karlsruhe
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 43卷 / 1-3期
关键词：
D O I：
10.1016/0924-4247(93)00708-C
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new micromechanical device for controlling fluid flow in fluidic microactuators is presented. By means of the LIGA technique, a bistable wall attachment amplifier (a fluidic flip-flop), with a nozzle width of 30 mum and a structural height of 500 mum, is manufactured. The operation of the bistable wall attachment amplifier with different kinds of gas is described. With the fabricated elements a pressure of more than 40 hPa can be switched from one output port to the other. A pressure of typically 12 hPa is needed for less than 1 ms to switch the device. The pressure at the output ports can be converted into a force or torque to drive an actuator or tools within a microsystem, such as a microendoscope for medical applications. It is intended to build a switch for fluidic power, which will be activated by an electric or an optical signal.
引用
收藏
页码：330 / 334
页数：5
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