OPTIMIZATION OF SI EPITAXIAL-GROWTH

被引：3
|
作者：
KOSZA, G
KUZNETSOV, FA
KORMANY, T
NAGY, L
机构：
来源：
JOURNAL OF CRYSTAL GROWTH | 1981年 / 52卷 / APR期
关键词：
D O I：
10.1016/0022-0248(81)90195-0
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
引用
收藏
页码：207 / 212
页数：6
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