EFFECT OF RESIDUAL-GAS PRESSURE ON THE THICKNESS MONITORING OF THIN-FILMS

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作者：

FAZYLZYANOV, RK

PANASENKO, BV

NESMELOV, EA

TAGIROV, RB

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SOVIET JOURNAL OF OPTICAL TECHNOLOGY | 1980年 / 47卷 / 07期

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O43 [光学];

学科分类号：

070207 ; 0803 ;

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页码：415 / 416

页数：2

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