ELECTROPHYSICAL PROPERTIES AND PHASE COMPOSITION OF THIN TANTALUM FILMS PREPARED BY CATHODE SPUTTERING

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作者：
BELEVSKI.VP
BELOUS, MV
YASHNIK, VM
PERMYAKO.VG
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来源：
FIZIKA METALLOV I METALLOVEDENIE | 1972年 / 33卷 / 03期
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TF [冶金工业];
学科分类号：
0806 ;
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页码：546 / &
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