LOWER TEMPERATURE CRYSTALLIZATION AND ORDERING IN SOL-GEL DERIVED PB(SC0.5TA0.5)O-3 POWDERS AND THIN-LAYERS

Lead scandium tantalate was prepared by a polymeric sol-gel method, and the crystallization into the perovskite phase was determined at significantly reduced temperatures (600-700°C). The extent of B-site cation ordering was also determined as a function of cooling conditions. Results are reported for the integration of capacitors on silicon with a capacitance density greater than 200 fF/μm2. A preferred (111) orientation was obtained, with (1/21/21/2) B-site cation partial ordering. No evidence was obtained for A-site Pb vacancy ordering. Results are reported for x-ray diffraction and selected-area electron diffraction investigations. © 1995 American Institute of Physics.