CERAMIC SENSOR TECHNOLOGY FOR THE MEASUREMENT OF MECHANICAL QUANTITIES AT HIGH-TEMPERATURE

被引：0
|
作者：
KNAPP, J
ANDREAE, G
PETERSOHN, D
机构：
[1] Bundesanstalt für Materialforschung und -prüfung, Berlin
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1990年 / 23卷 / 1-3期
关键词：
D O I：
10.1016/0924-4247(90)87092-W
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Differential capacitor sensors with variable airgap geometry enable mechanical quantities to be measured at temperatures up to 900 °C. In this paper it will be shown that ceramics, preferably alumina, are multi-purpose materials for capacitive sensors. The descriptions of technological approaches concern laser machining, sputter coating and reaction soldering of alumina components, electrical connections and alumina in cables; new sensors for strain and displacement are given as examples. © 1990.
引用
收藏
页码：1080 / 1083
页数：4
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