EXPERIMENTAL-STUDY OF THE BEAM DIVERGENCE FROM A BROAD-BEAM ELECTRON-CYCLOTRON RESONANCE ION-SOURCE

被引：3
|
作者：
GHANBARI, E
NGUYEN, T
LINDSTROM, R
机构：
[1] Veeco Instruments Inc., Plainview
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 01期
关键词：
D O I：
10.1063/1.1141325
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Various factors affecting divergence of an ion beam extracted from a broad-beam electron cyclotron resonance ion source are studied. The source has three graphite grid extraction optics providing an 18-cm ion beam. A simple apparatus and method is used to investigate the beam divergence as a function of source pressure, magnetic field, microwave power, beam energy, and suppression voltage. We discovered that the beam divergence ranges from ±4°to ±8°. We also noticed that, considering a 10% experimental error, suppression voltage does not strongly affect the beam divergence.
引用
收藏
页码：291 / 293
页数：3
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