ENVIRONMENTALLY FRIENDLY POLYSILANES - AN ALTERNATIVE ROUTE TO POLYSILANE PHOTORESISTS

被引：0
|
作者：
BEACH, JV
LOY, DA
HSIAO, YL
WAYMOUTH, RM
机构：
[1] SANDIA NATL LABS,DEPT PROPERTIES ORGAN MAT,ALBUQUERQUE,NM 87185
[2] STANFORD UNIV,DEPT CHEM,STANFORD,CA 94305
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1995年 / 209卷
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D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：121 / PMSE
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