MEASUREMENT OF STRESSES IN THIN-FILMS ON SINGLE CRYSTALLINE SUBSTRATES

被引：15
|
作者：
BOHG, A [1 ]
机构：
[1] IBM CORP,DIV SYST PROD,E FISHKILL LABS,HOPEWELL JUNCTION,NY 12533
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1978年 / 46卷 / 02期
关键词：
D O I：
10.1002/pssa.2210460206
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：445 / 450
页数：6
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