HETEROGENEITIES AND SURFACE EFFECTS IN GLOW-DISCHARGE DEPOSITED HYDROGENATED AMORPHOUS-SILICON FILMS

被引：24

作者：

FRITZSCHE, H ^{[1
]}

机构：

[1] UNIV CHICAGO,JAMES FRANCK INST,CHICAGO,IL 60637

来源：

THIN SOLID FILMS | 1982年 / 90卷 / 02期

关键词：

D O I：

10.1016/0040-6090(82)90631-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：119 / 129

页数：11

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