MOLECULAR-WEIGHT DEPENDENCE OF E-BEAM RESIST SENSITIVITY

被引：0
|
作者：
RODRIGUEZ, F
NAMASTE, YMN
DEMS, BC
KRASNOPOLER, AA
OBENDORF, SK
机构：
[1] CORNELL UNIV,SCH CHEM ENGN,ITHACA,NY 14853
[2] CORNELL UNIV,FIBER SCI PROGRAM,ITHACA,NY 14853
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1989年 / 197卷
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D O I：
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：96 / PMSE
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