PROCESS SIMULATION FOR LASER RECRYSTALLIZATION

被引：0
|
作者：
HU, B
SEIDL, A
NEUMAYER, G
BUCHNER, R
HABERGER, K
机构：
来源：
IEICE TRANSACTIONS ON ELECTRONICS | 1992年 / E75C卷 / 02期
关键词：
PROCESS SIMULATION; LASER RECRYSTALLIZATION; CRYSTAL GROWTH; GRAIN BOUNDARY; MICRO-ABSORBER;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Modeling and numerical simulation of crystal growth of Si film and heat transport in 3D structure were made for optimization of physical and geometrical parameters used during laser recrystallization. Based on simulations a new concept called micro-absorber was introduced for obtaining defect-free Si films.
引用
收藏
页码：138 / 144
页数：7
相关论文
共 50 条
  • [21] Advanced process simulation - Laser and flash annealing
    Law, Mark E.
    Sixteenth Biennial University/Government/Industry Microelectronics Symposium, Proceedings, 2006, : 213 - 213
  • [22] Laser hardening process simulation for mechanical parts
    Tani, G.
    Orazi, L.
    Fortunato, A.
    Campana, G.
    Cuccolini, G.
    HIGH ENERGY /AVERAGE POWER LASERS AND INTENSE BEAM APPLICATIONS, 2007, 6454
  • [23] Process simulation and optimization of laser tube bending
    Guan, Yanjin
    Yuan, Guiping
    Sun, Sheng
    Zhao, Guoqun
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2013, 65 (1-4): : 333 - 342
  • [24] Simulation and automatization of measurements process in laser interferometry
    Morozov, N., V
    FUNCTIONAL MATERIALS, 2005, 12 (01): : 117 - 119
  • [25] Process simulation and optimization of laser tube bending
    Yanjin Guan
    Guiping Yuan
    Sheng Sun
    Guoqun Zhao
    The International Journal of Advanced Manufacturing Technology, 2013, 65 : 333 - 342
  • [26] Thermal simulation of excimer Laser fusion and recrystallization of amorphous silicon for thin film transistors
    deUnamuno, S
    Fogarassy, E
    ANNALES DE PHYSIQUE, 1997, 22 : 225 - 226
  • [27] The process simulation of virtual laser surface hardening
    Taohong Zhang
    Tianyuan Xiao
    Bingru Yang
    The International Journal of Advanced Manufacturing Technology, 2008, 37 : 690 - 697
  • [28] The process simulation of virtual laser surface hardening
    Zhang, Taohong
    Xiao, Tianyuan
    Yang, Bingru
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2008, 37 (7-8): : 690 - 697
  • [29] Progress in numerical simulation of the laser cladding process
    Tamanna, Nusrat
    Crouch, Roger
    Naher, Sumsun
    OPTICS AND LASERS IN ENGINEERING, 2019, 122 : 151 - 163
  • [30] Thermophysics Simulation of Laser Recrystallization of High-Ge-Content SiGe on Si Substrate
    Zhang, Chao
    Song, Jianjun
    Zhang, Jie
    Liu, Shulin
    ADVANCES IN CONDENSED MATTER PHYSICS, 2018, 2018
12345