VERTICAL-CAVITY DEVICES AS WAVELENGTH-SELECTIVE WAVE-GUIDES

被引:17
|
作者
PEZESHKI, B
TONG, FF
KASH, JA
KISKER, DW
机构
[1] IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights
关键词
D O I
10.1109/50.337492
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We show that novel wavelength-sensitive devices can be fabricated by coupling a semiconductor vertical cavity resonator to a low index waveguide. The optical mode in the resonator propagates at an angle, and the resonator resembles a high index waveguide. A taper in the thickness of the resonator allows different parts of the waveguide to operate at different wavelengths. These structures are analyzed using both thin film equations and waveguide formalism. Concentrating on a waveguide demultiplexer, simple design equations are derived, and a demonstration device is fabricated for TE mode at 0.75 mum operation. Using AlGaAs/AlAs multilayers and a polymer top waveguide, the spectrometer exhibited a dispersion of 29 nm/cm, a wavelength resolution of better than 1 nm, and an intrinsic device efficiency of about 90%. A similar structure containing a light-emitting quantum well operated as a multiwavelength light source by modifying the spontaneous emission into the polymer waveguide.
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页码:1791 / 1801
页数:11
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