ION-BEAM ETCHING EQUIPMENT FOR PRODUCTION OF BUBBLE MEMORY DEVICES

被引：1
|
作者：
MONK, GW
THOMPSON, GR
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1979年 / 50卷 / 03期
关键词：
D O I：
10.1063/1.327034
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2299 / 2299
页数：1
相关论文
共 50 条
  • [21] INTRODUCTION TO REACTIVE ION-BEAM ETCHING
    DOWNEY, DF
    BOTTOMS, WR
    HANLEY, PR
    [J]. SOLID STATE TECHNOLOGY, 1981, 24 (02) : 121 - 127
  • [22] ION-BEAM ETCHING OF SURFACE GRATINGS
    SMITH, HI
    [J]. IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1974, SU21 (01): : 77 - 77
  • [23] ION-BEAM ETCHING WITH REACTIVE GASES
    BOLLINGER, LD
    [J]. SOLID STATE TECHNOLOGY, 1983, 26 (01) : 99 - 108
  • [24] ION-BEAM ASSISTED ETCHING OF SEMICONDUCTORS
    ZALM, PC
    [J]. VACUUM, 1986, 36 (11-12) : 787 - 797
  • [25] REACTIVE ION-BEAM ETCHING.
    Heath, B.A.
    Mayer, T.M.
    [J]. VLSI Electronics, Microstructure Science, 1984, 8 : 365 - 409
  • [26] MICROFABRICATION BY ION-BEAM ETCHING.
    Lee, Robert E.
    [J]. Semiconductor International, 1980, 3 (01): : 73 - 80
  • [27] ION-BEAM ETCHING FOR BETTER BONDING
    不详
    [J]. CME-CHARTERED MECHANICAL ENGINEER, 1984, 31 (11): : 101 - 101
  • [28] ION-BEAM ASSISTED ETCHING AND DEPOSITION
    GAMO, K
    NAMBA, S
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06): : 1927 - 1931
  • [29] ION-BEAM ETCHING OF SURFACE GRATINGS
    SMITH, HI
    MELNGAILIS, J
    WILLIAMSON, RC
    BROGAN, WT
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06): : 1127 - 1127
  • [30] APPLICATION OF ION-BEAM ETCHING IN MICROELECTRONICS
    EHRIG, K
    SCHLENK, R
    FALZ, M
    BIGL, F
    NEUMANN, H
    FAUST, B
    [J]. VACUUM, 1987, 37 (1-2) : 197 - 197
12345