DEFECT LUMINESCENCE IN CW LASER-ANNEALED SILICON

被引:19
|
作者
STREET, RA [1 ]
JOHNSON, NM [1 ]
GIBBONS, JF [1 ]
机构
[1] STANFORD UNIV,STANFORD,CA 94305
关键词
D O I
10.1063/1.325962
中图分类号
O59 [应用物理学];
学科分类号
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页码:8201 / 8203
页数:3
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