ION-BEAM STUDIES .2. CALORIMETRIC METHOD FOR ION-BEAM STUDIES

被引：10

作者：

CHRISTODOULIDES, CE ^{[1
]}

FREEMAN, JH ^{[1
]}

机构：

[1] UNIV SALFORD,DEPT ELECT ENGN,SALFORD M5 4WT,LANCASHIRE,ENGLAND

来源：

NUCLEAR INSTRUMENTS & METHODS | 1976年 / 135卷 / 01期

关键词：

D O I：

10.1016/0029-554X(76)90819-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：13 / 19

页数：7

共 50 条

[41] ION-BEAM OXIDATION
HARPER, JME
HEIBLUM, M
SPEIDELL, JL
CUOMO, JJ
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1981, 26 (03): : 446 - 446
[42] ION-BEAM MICROFABRICATION
GAMO, K
VACUUM, 1993, 44 (11-12) : 1089 - 1094
[43] ION-BEAM SUPERPINCH
WINTERBERG, F
PHYSICAL REVIEW A, 1981, 24 (04): : 2168 - 2173
[44] ION-BEAM TEXTURING
HUDSON, WR
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01): : 286 - 289
[45] ION-BEAM EPIPLANTATION
THOMAS, GE
BECKERS, LJ
VRAKKING, JJ
DEKONING, BR
JOURNAL OF CRYSTAL GROWTH, 1982, 56 (03) : 557 - 575
[46] ION-BEAM LITHOGRAPHY
BROWN, WL
VENKATESAN, T
WAGNER, A
SOLID STATE TECHNOLOGY, 1981, 24 (08) : 60 - 67
[47] ION-BEAM TECHNOLOGY
HOFKER, WK
PHILIPS TECHNICAL REVIEW, 1980, 39 (11): : 320 - 324
[48] ION-BEAM CVD
TABATA, O
KIMURA, S
KISHIMOTO, M
TAKAHASHI, M
SUZUKI, S
KUNORI, M
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (03) : C92 - C92
[49] ION-BEAM ETCHING
GLOERSEN, PG
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 28 - 35
[50] ION-BEAM LITHOGRAPHY
BROWN, WL
VENKATESAN, T
WAGNER, A
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 191 (1-3): : 157 - 168