IMPROVED LENS DESIGNS FOR MICROELECTRONICS APPLICATIONS

被引：0
|
作者：
TIBBETTS, RE [1 ]
WILCZYNSKI, JS [1 ]
机构：
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1978年 / 68卷 / 10期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：1374 / 1374
页数：1
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