IMPROVED LENS DESIGNS FOR MICROELECTRONICS APPLICATIONS

被引：0

作者：

TIBBETTS, RE ^{[1
]}

WILCZYNSKI, JS ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1374 / 1374

页数：1

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