A MODEL OF SIMULTANEOUS OR ALTERNATING ION-IMPLANTATION IN FILMS AND COATINGS BEING DEPOSITED

被引：0
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作者：
ISKANDEROVA, ZA
RADJABOV, TD
LEIDERMAN, RY
TUKFATULLIN, FK
机构：
来源：
EPM 87: ENERGY PULSE AND PARTICLE BEAM MODIFICATION OF MATERIALS | 1988年 / 8卷
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T [工业技术];
学科分类号：
08 ;
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页码：372 / 374
页数：3
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