PR-80 HIGH-CURRENT ION-IMPLANTATION MACHINE

被引：4
|
作者：
KAWAI, T
NAITOH, M
NOGAMI, M
KINOYAMA, T
NAGAI, N
FUJISAWA, H
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 21卷 / 2-4期
关键词：
D O I：
10.1016/0168-583X(87)90835-4
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：239 / 244
页数：6
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