ROLES OF IONS AND NEUTRAL ACTIVE SPECIES IN MICROWAVE PLASMA-ETCHING

被引：47
|
作者：
SUZUKI, K
OKUDAIRA, S
KANOMATA, I
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1979年 / 126卷 / 06期
关键词：
D O I：
10.1149/1.2129168
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：1024 / 1028
页数：5
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