THICKNESS MEASUREMENTS OF THIN-FILMS DEPOSITED ON SUBSTRATES

被引：0
|
作者：
FOULU, J [1 ]
HENOC, J [1 ]
机构：
[1] CTR NATL ETUD TELECOMMUN,PEC,F-92220 BAGNEUX,FRANCE
来源：
JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES | 1977年 / 2卷 / 06期
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：619 / 625
页数：7
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