DEFECT ANALYSIS BY ION CHANNELING - MONTE-CARLO SIMULATIONS OF THE DECHANNELING AND BACKSCATTERING EFFECTS OF LOOP DISLOCATIONS IN A SILICON CRYSTAL

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MAZZONE, AM

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MICROSCOPY OF SEMICONDUCTING MATERIALS 1989 | 1989年 / 100卷

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T [工业技术];

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08 ;

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页码：581 / 586

页数：6

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