CRITERIA FOR USE OF ELECTRON-BEAM CHARGING TECHNIQUE FOR VERY LARGE-SCALE INTEGRATION PROCESS INSPECTION

被引：1

作者：

JENKINS, KA

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1992年 / 10卷 / 06期

关键词：

D O I：

10.1116/1.586035

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A mathematical description of the method of testing by electron beam charging is used to clearly specify its measurement capabilities. The scanning electron microscopy parameters of beam current, frame scan time, and magnification, are used to derive the requirements necessary to distinguish between shorted and isolated structures.

引用

页码：2431 / 2435

页数：5

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