NOVEL PHOTOACOUSTIC-SPECTROSCOPY OF SEMICONDUCTOR THIN-FILMS BY A TRANSPARENT TRANSDUCER - PYROELECTRIC AND PIEZOELECTRIC EFFECTS

被引：4

作者：

KANEMITSU, Y ^{[1
]}

NABETA, H ^{[1
]}

机构：

[1] CHIBA UNIV,DEPT IMAGE SCI & TECHNOL,CHIBA 280,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1991年 / 59卷 / 06期

关键词：

D O I：

10.1063/1.105374

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have studied the generation mechanism of photoacoustic (PA) signals in semiconductor thin films by means of a transparent LiNbO3 transducer both experimentally and theoretically. In the transparent transducer method, the PA signal was detected at the light-irradiated surface of the samples. The PA signal of the thin film directly attached to the transducer is mainly due to the pyroelectric effect, and the PA signal of the underlain substrate is the piezoelectric signal caused by sample bending. These results show that this method becomes a powerful tool for measuring optical and thermal properties of thin films on the substrate nondestructively.

引用

页码：715 / 717

页数：3

共 43 条

[1] ANALYSIS OF PYROELECTRIC SIGNAL IN PHOTOACOUSTIC-SPECTROSCOPY USING A TRANSPARENT TRANSDUCER
HORITA, S
SAIKAWA, T
KONISHI, H
HATA, T
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (5B): : 2561 - 2566
[2] PHOTOACOUSTIC-SPECTROSCOPY OF CUINSE2 THIN-FILMS
ZEGADI, A
BAGNALL, DM
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TOMLINSON, RD
THIN SOLID FILMS, 1993, 226 (02) : 248 - 253
[3] PHOTOACOUSTIC-SPECTROSCOPY DETECTED BY PIEZOELECTRIC TRANSDUCER WITH RESONATOR
HIBARU, K
MORIMOTO, J
MIYAKAWA, T
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 : 280 - 282
[4] PHOTOACOUSTIC-SPECTROSCOPY OF SEMICONDUCTOR HETEROSTRUCTURES BY PIEZOELECTRIC TRANSDUCERS
KUBOTA, K
MURAI, H
NAKATSU, H
JOURNAL OF APPLIED PHYSICS, 1984, 55 (06) : 1520 - 1524
[5] Analysis of pyroelectric signal in photoacoustic spectroscopy using a transparent transducer
Horita, Susumu
Saikawa, Takeshi
Konishi, Hideaki
Hata, Tomonobu
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1993, 32 (5 B): : 2561 - 2566
[6] EVALUATION OF AMORPHOUS-SEMICONDUCTORS BY PHOTOACOUSTIC-SPECTROSCOPY USING A TRANSPARENT TRANSDUCER
KANEMITSU, Y
NABETA, H
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 : 277 - 279
[7] PHOTOACOUSTIC EFFECT OF PIEZOELECTRIC ZNO THIN-FILMS
LI, G
YIN, QR
FERROELECTRICS LETTERS SECTION, 1994, 18 (1-2) : 23 - 32
[8] EVALUATION OF ION-IMPLANTATION INTO SILICON BY PHOTOACOUSTIC-SPECTROSCOPY USING TRANSPARENT TRANSDUCER METHOD
HATA, T
YAGO, K
ADACHI, S
HORITA, S
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1988, 27 : 232 - 234
[9] INFLUENCE OF PIEZOELECTRIC AND PYROELECTRIC EFFECTS ON SIGNAL OF PAS USING A TRANSPARENT TRANSDUCER
HORITA, S
SAIKAWA, T
HATA, T
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 : 152 - 154
[10] Photoacoustic spectroscopy of semiconductor powders and thin films
Bernal-Alvarado, J
Vargas-Luna, M
ANALYTICAL SCIENCES, 2001, 17 : S309 - S311

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