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- [41] FORMATION OF EXCITED FRAGMENTS DUE TO THE INTERACTION BETWEEN ELECTRONS AND CHF3, CF4, C2F6 AND C3F8 MOLECULES OPTIKA I SPEKTROSKOPIYA, 1986, 60 (04): : 722 - 726
- [42] FLUOROCARBON HIGH-DENSITY PLASMAS .1. FLUOROCARBON FILM DEPOSITION AND ETCHING USING CF4 AND CHF3 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1994, 12 (02): : 323 - 332
- [44] Study of spatial distributions of F, H and CF2 radicals in DF CCP discharge in Ar/CF4 and Ar/CHF3 mixtures THIRD INTERNATIONAL WORKSHOP AND SUMMER SCHOOL ON PLASMA PHYSICS 2008, 2010, 207
- [48] Dissociative ionization of CF4 and CHF3 accompanying light emission:: Fragmention-photon coincidence (FIPCO) measurements by electron impact PHOTONIC, ELECTRONIC AND ATOMIC COLLISIONS, 2002, : 381 - 392