INHERENT AND STRESS-INDUCED LEAKAGE IN HEAVILY DOPED SILICON JUNCTIONS

被引:44
|
作者
HACKBARTH, E
TANG, DD
机构
[1] IBM T J Watson Research Cent,, Yorktown Heights, NY, USA
关键词
D O I
10.1109/16.8784
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
18
引用
收藏
页码:2108 / 2118
页数:11
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