IMAGING IN AN OPTICAL PROJECTION SYSTEM WITH A LASER-LIGHT SOURCE .2. MULTI-TRANSVERSE-MODE LASER-LIGHT ILLUMINATION

被引：0
|
作者：
TAKAMOTO, K [1 ]
机构：
[1] NIPPON TELEGRAPH & TEL PUBL CORP, LSI LABS, ATSUGI, KANAGAWA 24301, JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1995年 / 34卷 / 03期
关键词：
OPTICAL PROJECTION SYSTEM; IMAGING; LASER; INTENSITY DISTRIBUTION; COHERENCE;
D O I：
10.1143/JJAP.34.1576
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Imaging characteristics are analyzed using a one-dimensional model. The second source plane in an illumination system is illuminated by a laser light oscillating in a multitude of transverse modes. Intensity distributions for a line-and-space pattern with 5 lines are calculated. Focal tolerance is examined for intensity distributions due to the light oscillating in only even transverse modes. No linear relationship between the number of transverse modes and focal tolerance is observed. When a phase of the light field for each even transverse mode is randomly given, contrasts of intensity distributions do not deteriorate with defocus.
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页码：1576 / 1582
页数：7
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