POTENTIAL MEASUREMENTS DURING JET ETCHING OF P-TYPE GE AND P-TYPE SI

被引:5
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作者
SCHMIDT, PF
BLOMGREN, M
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D O I
10.1149/1.2427474
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:694 / 700
页数:7
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