共 50 条
- [31] ION-BEAM DEPOSITION NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 89 (1-4): : 325 - 331
- [34] DIRECT PATTERNING OF SPIN-ON GLASS BY FOCUSED ION-BEAM IRRADIATION JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (12B): : 4479 - 4482
- [40] ION-BEAM IRRADIATION EFFECT ON SOLUBILITY OF SPIN-ON GLASS TO METHANOL NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 : 1128 - 1131