共 50 条
- [37] THE MECHANICAL-PROPERTIES AND MICROSTRUCTURE OF PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITED SILICON-NITRIDE THIN-FILMS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (04): : 2464 - 2468
- [38] METHOD OF PRODUCING, STRUCTURE AND MECHANICAL PROPERTIES OF BITEJ THIN-FILMS IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII FIZIKA, 1972, (11): : 117 - +