SPECTRAL CHARACTERISTICS OF A GLOW-DISCHARGE SPUTTERING SOURCE

被引:0
|
作者
PATEL, BM [1 ]
WINEFORDNER, JD [1 ]
机构
[1] UNIV FLORIDA,DEPT CHEM,GAINESVILLE,FL 32611
来源
CANADIAN JOURNAL OF SPECTROSCOPY | 1987年 / 32卷 / 06期
关键词
D O I
暂无
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
引用
收藏
页码:138 / 147
页数:10
相关论文
共 50 条
  • [31] Some characteristics of a new planar glow-discharge source with and without magnetic field
    Chinese Acad of Sciences, Shenyang, China
    Spectrochim Acta Part B At Spectrosc, 8 (1161-1166):
  • [32] CATHODE SPUTTERING OF NIOBIUM AND ITS ALLOYS IN A HELIUM GLOW-DISCHARGE
    SKOROV, DM
    KALIN, BA
    VOLKOV, VB
    KARTSEV, PI
    KIRILIN, NM
    SOVIET ATOMIC ENERGY, 1975, 38 (05): : 431 - 432
  • [33] REDUCTION OF PUMPING TIME FOR A SPUTTERING SYSTEM BY GLOW-DISCHARGE CLEANING
    KAGATSUME, A
    UEDA, S
    AKIBA, M
    KAWABE, T
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (04): : 2364 - 2368
  • [34] An approach to estimate the sputtering yield of water in glow-discharge electrolysis
    Matsushima, Y
    Tezuka, A
    Sumida, K
    Maeda, K
    Noma, T
    Yamazaki, T
    Suzuki, T
    JOURNAL OF MATERIALS SCIENCE LETTERS, 2003, 22 (18) : 1259 - 1260
  • [35] ANALYSIS OF RF-SPUTTERING GLOW-DISCHARGE BY SPECTROSCOPIC METHOD
    RATINEN, H
    APPLIED PHYSICS LETTERS, 1972, 21 (10) : 473 - &
  • [36] On glow-discharge sputtering of iron and steels in a commercial deposition plant
    Kringhoj, P
    Budtz-Jorgensen, CV
    Nielsen, JF
    Bottiger, J
    Eskildsen, SS
    Mathiasen, C
    SURFACE & COATINGS TECHNOLOGY, 2001, 137 (2-3): : 277 - 283
  • [37] APPLICATION OF A GLOW-DISCHARGE ION GUN TO SPUTTERING YIELD MEASUREMENTS
    KOWALSKI, ZW
    JOURNAL OF MATERIALS SCIENCE LETTERS, 1986, 5 (10) : 1061 - 1062
  • [38] A GLOW-DISCHARGE MASS-SPECTROMETRY STUDY OF REACTIVE SPUTTERING
    HECQ, M
    HECQ, A
    THIN SOLID FILMS, 1981, 76 (01) : 35 - 43
  • [39] CHARACTERISTICS OF A HIGH-VOLTAGE GLOW-DISCHARGE
    POPOVICI, C
    BALACEANU, M
    CEAUSESCU, N
    AVRAM, E
    JOURNAL DE PHYSIQUE, 1979, 40 : 171 - 172
  • [40] GLOW-DISCHARGE SPUTTERING OF CHROMIUM AND NIOBIUM DISK CATHODES IN ARGON
    TONG, SL
    HARRISON, WW
    ANALYTICAL CHEMISTRY, 1984, 56 (12) : 2028 - 2033