OPTICAL BEAM-DEFLECTION SCANNING FORCE MICROSCOPE WITH EASY CANTILEVER-LASER BEAM ALIGNMENT

被引：0
|
作者：
SUGIHARA, K
SAKAI, A
MATSUDA, T
TOYOSAKI, M
TANAKA, K
MATSUURA, A
TSUKADA, S
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 02期
关键词：
D O I：
10.1116/1.587400
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：620 / 621
页数：2
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