ATOM-PROBE FIELD-ION MICROSCOPY

被引:3
|
作者
LEISCH, M
机构
[1] Institut für Festkörperphysik, Technische Universität Graz, Graz, A-8010
来源
MIKROCHIMICA ACTA | 1992年 / 107卷 / 3-6期
关键词
ATOM PROBE; FIELD ION MICROSCOPY; SURFACE SEGREGATION; PRECIPITATION;
D O I
10.1007/BF01244464
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The atom probe field ion microscope (AP-FIM) is a combination of a field ion microscope and a time-of-flight mass spectrometer with a single ion detection sensivity. With the field ion microscope topology of a surface, surface reactions and surface modifications can be studied in atomic detail. By time-of-flight measurements surface layers and interface layers can be chemically analyzed atom by atom and atomic layer by atomic layer. Compositional variations according to surface or interface segregation, precipitations, or surface changes in corrosion or in electrochemical layer formation etc. can be studied quantitatively on a subnanometer scale. Some of our studies on related problems will be decribed briefly.
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页码:95 / 104
页数:10
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