PULSED UV LASER PHOTOCHEMICAL DOPING OF SEMICONDUCTORS

被引：0
|
作者：
DEUTSCH, TF [1 ]
EHRLICH, DJ [1 ]
TURNER, GW [1 ]
FAN, JCC [1 ]
OSGOOD, RM [1 ]
机构：
[1] MIT,LINCOLN LAB,LEXINGTON,MA 02173
来源：
IEEE JOURNAL OF QUANTUM ELECTRONICS | 1981年 / 17卷 / 12期
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：110 / 110
页数：1
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