DEPOSITION OF THIN-FILMS BY DECOMPOSITION OF TETRA-ETHOXY SILANE IN A RADIO-FREQUENCY GLOW-DISCHARGE

被引：101
|
作者：
MUKHERJEE, SP [1 ]
EVANS, PE [1 ]
机构：
[1] UNIV MANCHESTER, INST SCI & TECHNOL, MANCHESTER, LANCASHIRE, ENGLAND
来源：
THIN SOLID FILMS | 1972年 / 14卷 / 01期
关键词：
D O I：
10.1016/0040-6090(72)90373-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：105 / 118
页数：14
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