RF SPUTTERING CHARACTERISTICS AND POWER-SUPPLY COUPLING CONDITIONS

被引：4

作者：

NORSTROM, H ^{[1
]}

BLOM, HO ^{[1
]}

机构：

[1] INST TECHNOL,S-75121 UPPSALA,SWEDEN

来源：

关键词：

D O I：

10.1016/0040-6090(81)90294-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：255 / 265

页数：11

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