MECHANISM OF IMPURITY DIFFUSION IN SILICON

被引：13
|
作者：
DOBSON, PS
机构：
来源：
PHILOSOPHICAL MAGAZINE | 1972年 / 26卷 / 06期
关键词：
D O I：
10.1080/14786437208220343
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：1301 / &
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