RESISTIVITY AND MAGNETORESISTANCE OF MONOCRYSTALLINE TASI2 AND VSI2

被引:12
|
作者
GOTTLIEB, U [1 ]
LABORDE, O [1 ]
THOMAS, O [1 ]
WEISS, F [1 ]
ROUAULT, A [1 ]
SENATEUR, JP [1 ]
MADAR, R [1 ]
机构
[1] CRTBT,SNCI,CNRS,F-38042 GRENOBLE,FRANCE
来源
SURFACE & COATINGS TECHNOLOGY | 1991年 / 45卷 / 1-3期
关键词
D O I
10.1016/0257-8972(91)90229-P
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Refractory metal silicides can be used as protective coatings for high temperature applications as well as interconnectors in silicon integrated circuits. A good understanding of their properties as thin films, however, requires a careful determination of their intrinsic physical and mechanical characteristics. We report resistivity and magnetoresistance measurements (4.2 less-than-or-equal-to T less-than-or-equal-to 300 K, H less-than-or-equal-to 7.6 T) of monocrystalline VSi2 (RRR almost-equal-to 20) and TaSi2 (RRR greater-than-or-equal-to 400) (RRR is the residual resistance ratio rho(293 K)/rho(4.2 K)). Single crystals have been obtained by Czochralski pulling from a levitated melt. Both materials crystallize in the hexagonal C40 structure (space group P6222). The two metallic compounds have about the same anisotropic behaviour in resistivity. The measurements show a linear behaviour of resistivity at high temperatures (150 less-than-or-equal-to T less-than-or-equal-to 300 K) for the directions [0001] for both materials, whereas a negative deviation from the linearity is found at high temperatures (T greater-than-or-equal-to 200 K) with the current parallel to the [101BAR0] axis. For TaSi2 a strong magnetoresistance effect has been observed, which is about 600 times stronger than the effect for VS12.
引用
收藏
页码:237 / 243
页数:7
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