THERMALLY GROWN SIO2 FILM STANDARDS FOR ELASTIC RECOIL DETECTION ANALYSIS

被引：22
|
作者：
WHITLOW, HJ
ANDERSSON, ABC
PETERSSON, CS
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 36卷 / 01期
关键词：
D O I：
10.1016/0168-583X(89)90059-1
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：53 / 59
页数：7
相关论文
共 50 条
  • [31] THE INFLUENCE OF PROCESSES ON COMPOSITION OF THERMALLY NITRIDED SIO2 FILM
    LIU, BY
    CHENG, YC
    LIU, ZH
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (12) : 3081 - 3086
  • [32] STUDY OF THE RAPID THERMAL NITRIDATION AND SILICIDATION OF TI USING ELASTIC RECOIL DETECTION .2. TI ON SIO2
    KROOSHOF, GJP
    HABRAKEN, FHPM
    VANDERWEG, WF
    VANDENHOVE, L
    MAEX, K
    DEKEERSMAECKER, RF
    JOURNAL OF APPLIED PHYSICS, 1988, 63 (10) : 5110 - 5114
  • [33] INTRINSIC CU GETTERING AT A THERMALLY GROWN SIO2/SI INTERFACE
    BAI, P
    YANG, GR
    LU, TM
    JOURNAL OF APPLIED PHYSICS, 1990, 68 (07) : 3313 - 3316
  • [34] BUCKLING OF THERMALLY-GROWN SIO2 THIN-FILMS
    WILMSEN, CW
    THOMPSON, EG
    MEISSNER, GH
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1972, ED19 (01) : 122 - &
  • [35] Enhanced oxidation of thermally grown SiO2 due to P precipitates
    Dastgheib-Shirazi, Amir
    Rinder, Johannes
    Micard, Gabriel
    Steyer, Michael
    Hahn, Giso
    Terheiden, Barbara
    PROCEEDINGS OF THE 6TH INTERNATIONAL CONFERENCE ON CRYSTALLINE SILICON PHOTOVOLTAICS (SILICONPV 2016), 2016, 92 : 457 - 465
  • [36] Transport of detrapped charges in thermally wet grown SiO2 electrets
    Gunther, Peter
    Xia, Zhongfu
    Journal of Applied Physics, 1993, 74 (12):
  • [37] THE ORIGIN OF DEFECTS IN SIO2 THERMALLY GROWN ON CZOCHRALSKI SILICON SUBSTRATES
    ITSUMI, M
    TOMITA, M
    YAMAWAKI, M
    JOURNAL OF APPLIED PHYSICS, 1995, 78 (03) : 1940 - 1943
  • [38] Arrangement of Si and O atoms in thermally grown SiO2 films
    Davazoglou, D
    Vamvakas, VE
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2003, 150 (05) : F90 - F96
  • [39] Simulation of correlated diffusion of Si and B in thermally grown SiO2
    Uematsu, M
    Kageshima, H
    Takahashi, Y
    Fukatsu, S
    Itoh, KM
    Shiraishi, K
    JOURNAL OF APPLIED PHYSICS, 2004, 96 (10) : 5513 - 5519
  • [40] TRANSPORT OF DETRAPPED CHARGES IN THERMALLY WET GROWN SIO2 ELECTRETS
    GUNTHER, P
    XIA, ZF
    JOURNAL OF APPLIED PHYSICS, 1993, 74 (12) : 7269 - 7274
12345