SPUTTERING OF OXIDE FILMS IN PLASMA ANODIZATION OF ALUMINUM

被引：15
|
作者：
LOCKER, LD
SKOLNICK, LP
机构：
来源：
APPLIED PHYSICS LETTERS | 1968年 / 12卷 / 11期
关键词：
D O I：
10.1063/1.1651871
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：396 / &
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