FABRICATION OF FE-ZR-N FILMS WITH VERY LOW COERCIVITY

被引：7
|
作者：
TANEKO, N [1 ]
SHIMADA, Y [1 ]
FUKAMICHI, K [1 ]
MIYAKAWA, C [1 ]
机构：
[1] TOHOKU UNIV,SCI MEASUREMENTS RES INST,SENDAI,MIYAGI 980,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1991年 / 30卷 / 2A期
关键词：
MAGNETIC SOFTNESS; NITRIDE FILMS; THERMAL STABILITY; LOW COERCIVITY; SPUTTERING; MICROCRYSTALLINE STRUCTURE;
D O I：
10.1143/JJAP.30.L195
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Fe-Zr-N films with very low coercivity have been fabricated by RF magnetron sputtering. The films consist of very fine alpha Fe and ZrN crystals. The crystal size of alpha Fe is estimated to be less than 50 angstrom, resulting in decrease of the coercivity down to 10 A/m. The magnetic softness and thermal stability are available only for a very narrow range of nitrogen content.
引用
收藏
页码：L195 / L197
页数：3
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