ION-BEAM EFFECTS ON SURFACE AND SUBSURFACE COMPOSITION OF NEAR-NOBLE SILICIDES

被引：10
|
作者：
VALERI, S
OTTAVIANI, G
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词：
D O I：
10.1116/1.574769
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1358 / 1361
页数：4
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