共 50 条
- [33] THIN-FILM INORGANIC RESISTS FOR SUBMICRON FABRICATION JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (03): : 467 - 469
- [34] Fabrication of piezoelectric multilayer thin-film actuators Microsystem Technologies, 2016, 22 : 1275 - 1283
- [39] FABRICATION OF THIN-FILM MICROCIRCUITS ON CURVED SUBSTRATES JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1969, 2 (02): : 206 - &
- [40] Fabrication of piezoelectric multilayer thin-film actuators MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2016, 22 (06): : 1275 - 1283