INTERACTION OF AL3TA INTERMETALLIC COMPOUND FILM WITH SI

被引：2
|
作者：
NOYA, A
SASAKI, K
UMEZAWA, T
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 12期
关键词：
D O I：
10.1143/JJAP.27.L2262
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：L2262 / L2264
页数：3
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