TRANSPARENT AND HIGHLY CONDUCTIVE FILMS OF ZNO PREPARED BY RF REACTIVE MAGNETRON SPUTTERING

被引：181
|
作者：
WEBB, JB [1 ]
WILLIAMS, DF [1 ]
BUCHANAN, M [1 ]
机构：
[1] NATL RES COUNCIL CANADA,SOLAR ENERGY PROJECT,OTTAWA K1A 0R6,ONTARIO,CANADA
来源：
APPLIED PHYSICS LETTERS | 1981年 / 39卷 / 08期
关键词：
D O I：
10.1063/1.92815
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：640 / 642
页数：3
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