UHV SYSTEM FOR INSITU PREPARATION AND ANALYSIS OF THIN-FILMS AND SURFACES

被引：9

|

作者：

SHAPIRA, Y

GRUNBAUM, E

机构：

来源：

VACUUM | 1978年 / 28卷 / 12期

关键词：

D O I：

10.1016/0042-207X(78)90003-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：523 / 526

页数：4

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